英***HHV Auto306 科研工作者和电子显微学***的多功能镀膜设备

HHV Auto306是***种多功能的紧凑型镀膜设备，设计用于满足科研工作者和电子显微学***的需求。Auto306可配备各种真空系统、真空腔室和标准化工艺附件，提供***系列实验技术以满足现代化实验室的需要。
 

Auto306可选择配置钟罩式玻璃腔室、圆柱形玻璃腔室，也可以配置通用的FL400前开门式不锈钢箱式腔室。FL400腔室具有额外的高度与宽度，适用于安装较多的工艺附件。 

 

客户可选择的模块化工艺附件，包括热阻蒸发源及其控制电源、电子束蒸发源、遮挡板、基片夹具以及膜厚监控仪等。
 

真空系统由触屏PLC控制和监控，易于操作；高真空泵选择包括扩散泵、涡轮分子泵、冷凝泵，并使用油封或干式泵作为支持泵。集成的具有备用电池的高真空阀门可在意外情况时保护泵和样品。

HHV Auto306 is a multifunctional compact coating device designed to meet the needs of researchers ａnd electron microbiologists.Auto306 can be equipped with a variety of vacuum systems, vacuum Chambers ａnd standardized process accessories, providing a range of experimental technologies to meet the needs of modern laboratories.

Auto306 can be equipped with bell jar glass chamber, cylindrical glass chamber or universal FL400 front door stainless steel box chamber.The FL400 chamber has extra height ａnd width, suitable for mounting more process accessories. 

Customers can choose modular process accessories, including thermal resistance evaporation source ａnd its control power, electron beam evaporation source, shielding plate, substrate jig ａnd film thickness monitor.

The vacuum system is controlled ａnd monitored by touch screen PLC, which is easy to operate.High vacuum pump options include diffusion pumps, turbo molecular pumps, condensing pumps, ａnd use oil seals or dry pumps as support pumps.Integrated high vacuum valves with spare batteries protect pumps ａnd samples in case of accidents.